Multi-fiber/port hermetic capsule sealed by metallization and method
An hermetically sealed monolithic photonic integrated circuit (PIC) including optical components and multiple optical and electrical inputs/outputs. The integrated circuit including a semiconductor/metal base with sensitive semiconductor/polymer electrical and optical components formed therein. The...
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Main Author | |
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Format | Patent |
Language | English |
Published |
25.12.2018
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Subjects | |
Online Access | Get full text |
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Summary: | An hermetically sealed monolithic photonic integrated circuit (PIC) including optical components and multiple optical and electrical inputs/outputs. The integrated circuit including a semiconductor/metal base with sensitive semiconductor/polymer electrical and optical components formed therein. The electrical and optical components having multiple optical and electrical inputs, multiple optical and electrical outputs, and/or multiple optical and electrical inputs and outputs. A semiconductor/metal basic lid is sealed to the semiconductor/metal base by metallization so as to form a chamber including the sensitive semiconductor/polymer electrical and optical components and hermetically sealing the chamber and the sensitive components from the ambient in a basic hermetic capsule with multiple optical pathways coupling multiple optical fibers to the optical components sealed within the chamber. |
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Bibliography: | Application Number: US201815994966 |