Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

• Main Authors: Stamper, Anthony K, Jahnes, Christopher V
• Format: Patent
• Language: English
• Published: 04.12.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE DEVICES; GENERATION; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; RELAYS; SELECTORS; TRANSPORTING

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.