Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator...

Full description

Saved in:
Bibliographic Details
Main Authors Stamper, Anthony K, Jahnes, Christopher V
Format Patent
LanguageEnglish
Published 04.12.2018
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
GENERATION
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
RELAYS
SELECTORS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.
Bibliography:Application Number: US201615155409