Manufacturing method of light-emitting device

A manufacturing method of light-emitting device is disclosed. The method includes providing an LED wafer comprising a substrate and a semiconductor stack formed on the substrate, wherein the semiconductor stack has a lower surface facing the substrate and an upper surface opposite to the lower surfa...

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Bibliographic Details
Main Authors Kuo, De-Shan, Huang, Jiun-Ru, Li, Jian-Huei, Chen, Ying-Chieh, Yang, Jhih-Jheng, Chiu, Po-Shun, Lin, Zi-Jin
Format Patent
LanguageEnglish
Published 20.11.2018
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Summary:A manufacturing method of light-emitting device is disclosed. The method includes providing an LED wafer comprising a substrate and a semiconductor stack formed on the substrate, wherein the semiconductor stack has a lower surface facing the substrate and an upper surface opposite to the lower surface; providing a first laser to the LED wafer and irradiating the LED wafer from the upper surface to form a plurality of scribing lines on the upper surface; providing and focusing a second laser on an interior of the substrate to form a plurality of textured areas in the substrate; and providing force on the LED wafer to separate the LED wafer into a plurality of LED chips.
Bibliography:Application Number: US201715626993