System and method for determining an optimized schedule of a production line

A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other. The method includes determining time for individual operations of a robotic arm and a processin...

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Bibliographic Details
Main Authors Wu, Naiqi, Yang, Fajun, Qiao, Yan, Zhou, Mengchu
Format Patent
LanguageEnglish
Published 16.10.2018
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Summary:A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other. The method includes determining time for individual operations of a robotic arm and a processing module in the plurality of single-arm tools and dual-arm tools; determining robot waiting time of the single-arm tools and dual-arm tools based on the time for individual operations and different connection relationships of the plurality of single-arm tools and dual-arm tools; determining whether the optimized production schedule exists using the determined waiting time, wherein the optimized production schedule only exists if the hybrid multi-cluster tool is process-dominant where the robot activity time of the plurality of single-arm tools and dual-arm tools is substantially shorter than processing time at the processing module; and determining the optimized production schedule if the optimized production schedule exists.
Bibliography:Application Number: US201514920026