Deposition on two sides of a web
Apparatuses and methods for depositing materials on both side of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
07.08.2018
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Subjects | |
Online Access | Get full text |
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Summary: | Apparatuses and methods for depositing materials on both side of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition. |
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Bibliography: | Application Number: US201414252633 |