ESD protection structure and method of fabrication thereof

• Main Authors: Laine, Jean Philippe, Besse, Patrice
• Format: Patent
• Language: English
• Published: 31.07.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An ESD protection structure formed within an isolation trench and comprising a first peripheral semiconductor region of a first doping type, a second semiconductor region of the first doping type, and a semiconductor structure of a second doping type opposite to the first doping type formed to provide lateral isolation between the semiconductor regions of the first doping type and isolation between the further semiconductor region of the first doping type and the isolation trench. The semiconductor structure of the second doping type is formed such that no semiconductor region of the second doping type is formed between a peripheral side of the first semiconductor region of the first doping type and a wall of the isolation trench, and no semiconductor region of the first doping type is in contact with the isolation trench other than the first semiconductor region of the first doping type.