Process for preparing octachlorotrisilane and higher polychlorosilanes with utilization of hexachlorodisilane

A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.

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Bibliographic Details
Main Authors Rauleder, Hartwig, Moussallem, Imad, Brausch, Nicole, Lang, Juergen Erwin, Trocha, Martin
Format Patent
LanguageEnglish
Published 17.07.2018
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.
Bibliography:Application Number: US201615138044