Purging apparatus and purging method for substrate storage container

Provided is a purging apparatus including an upper nozzle provided above an opening of a substrate storage container and configured to supply a dry gas obliquely downwardly to a side opposite to the opening of the substrate storage container and over the entire surface of the width of the opening of...

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Bibliographic Details
Main Authors Kaise, Seiichi, Amemiya, Shigeki, Nanasaki, Genichi
Format Patent
LanguageEnglish
Published 03.07.2018
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:Provided is a purging apparatus including an upper nozzle provided above an opening of a substrate storage container and configured to supply a dry gas obliquely downwardly to a side opposite to the opening of the substrate storage container and over the entire surface of the width of the opening of the substrate storage container; and a plurality of side nozzles provided at both left and right sides of the opening of the substrate storage container, respectively, and each configured to supply the dry gas towards the inside of the substrate storage container from an outside of the opening of the substrate storage container. Each of the side nozzles is longer than a height of the opening of the substrate storage container and is provided with a plurality of supply holes formed thereon at predetermined intervals in a vertical direction.
Bibliography:Application Number: US201314370306