Electrostatic discharge device and plasma processing equipment

• Main Authors: PEI, JIANG-TAO, GUO, ER-FEI, YANG, KUAN
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; NATURALLY-OCCURRING ELECTRICITY; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES; STATIC ELECTRICITY

The utility model discloses an electrostatic discharge device and plasma processing equipment. The electrostatic discharge device comprises a resistor, an outer sleeve, an inner sleeve, a first electric connector, a second electric connector, a first shielding tube and a second shielding tube. The outer sleeve is sleeved outside the inner sleeve, and the inner sleeve is sleeved outside the resistor. And the first shielding tube and the second shielding tube are sleeved outside the first electric connector and the second electric connector and are used for protecting the connection part of the resistor pins. The first electric connector is electrically connected with the equipment board, and the second electric connector is electrically connected with the shielding board. The electrostatic discharge device provided by the utility model can eliminate electrostatic charges accumulated in plasma processing equipment, and does not cause radio frequency leakage.