TWI849801B

• Main Authors: SHEN, YIN, SU, ZHAN, PENG, BO, HUA, SHI-YUE, MENG, HUAI-YU, DADI, SETIADI
• Format: Patent
• Language: Chinese
• Published: 21.07.2024
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The present invention relates to the technical field of semiconductors, and provides an electro-optic modulator and a manufacturing method therefor. In embodiments, the electro-optic modulator comprises hybrid waveguides and electrodes located on the two sides of each hybrid waveguide. The manufacturing method comprises: providing a first component, the first component at least comprising a silicon layer and conductive wiring structures located on the two sides of the silicon layer; providing a second component, the second component comprising a nonlinear optical material layer and conductive wiring structures located on the two sides of the nonlinear optical material layer; and bonding the first component and the second component together; wherein the silicon layer and the nonlinear optical material layer are stacked together to form the hybrid waveguides, and the conductive wiring structures located on the two sides of the silicon layer are electrically connected to the conductive wiring structures located