Advanced in-line part average testing

An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or...

Full description

Saved in:
Bibliographic Details
Main Authors SAVILLE, BARRY, RATHERT, ROBERT J, BHATTI, NAEMA, VON DEN HOFF, MIKE, CAPPEL, ROBERT, SHERMAN, KARA L, PRICE, DAVID W, DONZELLA, ORESTE, SUTHERLAND, DOUG, GROOS, THOMAS, LIM, TENG-SONG, ROBINSON, JOHN CHARLES
Format Patent
LanguageChinese
English
Published 21.03.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
Online AccessGet full text

Cover

More Information
Summary:An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.
Bibliography:Application Number: TW202110100354