Wafer carrier device with position limiting functions and wafer carrier cassette device thereof

• Main Authors: LO, CHIEN-HUI, WU, CHIN-YUAN
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A wafer carrier device with position-limiting functions comprises: a mounting base, a rotation mechanism, a wafer carriage cassette, two position-limit members, and two position-limit drive assemblies. the rotation mechanism is disposed on the mounting base. The wafer carriage cassette is disposed on the rotation mechanism. Wafer carriage cassette slots are formed in the wafer carriage cassette. The two position-limit members are mounted pivotally on the wafer carriage cassette slots and ca be positioned on at a position-limit position to limit the wafers in the wafer carriage cassette slots from detaching from the wafer carriage cassette slots. The position-limit drive assemblies are disposed on the rotation mechanism to drive the position-limit members to pivot from the position-limit position a release position such that the wafers can separate freely from the wafer carriage cassette. The structures of above device can prevent the wafer from inadvertently separating out from the wafer carriage cassette dur