Apparatus and method for dispensing fluid

A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configure...

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Bibliographic Details
Main Authors NASMAN, RONALD W, GROOTEGOED, JAMES, HULI, LIOR, JACOBSON, NORMAN, DEVILLIERS, ANTON, ROBISON, RODNEY
Format Patent
LanguageChinese
English
Published 11.01.2024
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Summary:A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.
Bibliography:Application Number: TW20209110801