Edge bead removal system and method of treating a substrate

An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms are distanced from each other defining a reception space between them for accommodating a substrate to be treated. The protruding arms each ha...

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Main Authors TARGUS, RAINER, LATTARD, LUDOVIC
Format Patent
LanguageChinese
English
Published 01.12.2023
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Abstract An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms are distanced from each other defining a reception space between them for accommodating a substrate to be treated. The protruding arms each have a functional surface facing each other, and wherein the functional surfaces each have at least one fluid outlet. Further, a method of treating a substrate is described.
AbstractList An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms are distanced from each other defining a reception space between them for accommodating a substrate to be treated. The protruding arms each have a functional surface facing each other, and wherein the functional surfaces each have at least one fluid outlet. Further, a method of treating a substrate is described.
Author LATTARD, LUDOVIC
TARGUS, RAINER
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Snippet An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms...
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SubjectTerms APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
Title Edge bead removal system and method of treating a substrate
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