Edge bead removal system and method of treating a substrate
An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms are distanced from each other defining a reception space between them for accommodating a substrate to be treated. The protruding arms each ha...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.12.2023
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Subjects | |
Online Access | Get full text |
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Summary: | An edge bead removal system for treating a substrata includes an edge bead removal head with a main body and two arms protruding from the main body. The arms are distanced from each other defining a reception space between them for accommodating a substrate to be treated. The protruding arms each have a functional surface facing each other, and wherein the functional surfaces each have at least one fluid outlet. Further, a method of treating a substrate is described. |
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Bibliography: | Application Number: TW20198134465 |