TWI823510B

Provided is technology with which it is possible to easily and efficiently assess/detect an abnormality through comparison of similar cell structures within an observation image. This computer system analyzes an observation image of a sample by using a charged electron beam device. The computer syst...

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Bibliographic Details
Main Authors FUJIMURA, ICHIRO, KONNO, AZUSA
Format Patent
LanguageChinese
Published 21.11.2023
Subjects
CALCULATING
COMPUTING
COUNTING
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:Provided is technology with which it is possible to easily and efficiently assess/detect an abnormality through comparison of similar cell structures within an observation image. This computer system analyzes an observation image of a sample by using a charged electron beam device. The computer system carries out: an extraction process (step S3) for extracting, from an observation image and as a similar image, one or more second cell regions that are similar to a reference image, the reference image being a first cell region that is designated by a user or that is automatically set; an assessment process (step S6) for comparing, between the reference image and the extracted similar image, a plurality of regions of interest (ROIs) included in the reference image on the basis of a rule in which the relationship between the plurality of ROIs is stipulated, thereby assessing whether an abnormality is present; and an output process (step S7) for outputting, to the user as assessment results, the position of each c
Bibliography:Application Number: TW202211129575