Chamber matching with neural networks in semiconductor equipment tools

• Main Authors: DIDARI, SIMA, RAJAGOPAL, HARIKRISHNAN, HAO, HENG, LIAO, TIANQING
• Format: Patent
• Language: Chinese; English
• Published: 21.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

A server trains a neural network by feeding a first set of input time-series data of one or more sensors of a first processing chamber that is within specification to the neural network to produce a corresponding first set of output time-series data. The server calculates a first error. The server feeds a second set of input time-series data from corresponding one or more sensors associated with a second processing chamber under test to the trained neural network to produce a corresponding second set of output time-series data. The server calculates a second error. Responsive to the difference between a second error between the second set of input time-series data and the corresponding second set of output time-series data and a first error between the first set of input time-series data and the corresponding first set of output time-series data being equal to or exceeding a threshold amount, the server declares that the second processing chamber under test mismatches the first processing chamber that is with