TWI811513B

A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.

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Bibliographic Details
Main Authors YOSHIMIZU, YASUHITO, MATSUO, KEIICHIRO, KUGE, NOBUHITO, KAGI, YUI, ITO, FUYUMA, OBATA, SUSUMU, SANO, MITSUO
Format Patent
LanguageChinese
Published 11.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.
AbstractList A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.
Author KAGI, YUI
YOSHIMIZU, YASUHITO
ITO, FUYUMA
OBATA, SUSUMU
KUGE, NOBUHITO
MATSUO, KEIICHIRO
SANO, MITSUO
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– fullname: KAGI, YUI
– fullname: ITO, FUYUMA
– fullname: OBATA, SUSUMU
– fullname: SANO, MITSUO
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RelatedCompanies KABUSHIKI KAISHA TOSHIBA
KIOXIA CORPORATION
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Snippet A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title TWI811513B
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