TWI811513B

A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.

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Bibliographic Details
Main Authors YOSHIMIZU, YASUHITO, MATSUO, KEIICHIRO, KUGE, NOBUHITO, KAGI, YUI, ITO, FUYUMA, OBATA, SUSUMU, SANO, MITSUO
Format Patent
LanguageChinese
Published 11.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A semiconductor wafer includes a surface having at least one recess including an inner wall surface. The inner wall surface is exposed.
Bibliography:Application Number: TW20209100702