VERTICAL CAVITY SURFACE EMITTING LASER

• Main Authors: LIU, SONG, WENG, WEI CHENG, LIANG, DONG
• Format: Patent
• Language: Chinese; English
• Published: 21.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

Provided VCSEL includes emitters arranged in an array disposed on a surface of a substrate, a first passivation layer disposed on a surface of the emitters facing away from the substrate and provided with a first via, a second passivation layer provided with a second via, and a first pad. The first...