VERTICAL CAVITY SURFACE EMITTING LASER

Provided VCSEL includes emitters arranged in an array disposed on a surface of a substrate, a first passivation layer disposed on a surface of the emitters facing away from the substrate and provided with a first via, a second passivation layer provided with a second via, and a first pad. The first...

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Bibliographic Details
Main Authors LIU, SONG, WENG, WEI CHENG, LIANG, DONG
Format Patent
LanguageChinese
English
Published 21.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Summary:Provided VCSEL includes emitters arranged in an array disposed on a surface of a substrate, a first passivation layer disposed on a surface of the emitters facing away from the substrate and provided with a first via, a second passivation layer provided with a second via, and a first pad. The first pad includes first sub-pads and at least one second sub-pad, a number of the first sub-pads is equal to a number of the emitters, the first sub-pads are disposed on a side of the first passivation layer facing away from the substrate and connected to the emitters through the first via, the second passivation layer covers the first sub-pads and the first passivation layer, and the at least one second sub-pad is connected to the first sub-pads through the second via.
Bibliography:Application Number: TW202211118293