Apparatus and system

There is disclosed an apparatus for transferring a semiconductor device from a wafer to a target position. The apparatus comprises at least one rotatable transfer assembly, which comprises a transfer head rotatable about an axis of rotation of the rotatable transfer assembly to transfer a semiconduc...

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Bibliographic Details
Main Authors HUYBERS, RALPH, VAN DE RIJDT, HANS
Format Patent
LanguageChinese
English
Published 01.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:There is disclosed an apparatus for transferring a semiconductor device from a wafer to a target position. The apparatus comprises at least one rotatable transfer assembly, which comprises a transfer head rotatable about an axis of rotation of the rotatable transfer assembly to transfer a semiconductor device from a pick-up position to a transfer position. The apparatus also comprises a transfer assembly actuator arrangement operative to effect movement of the at least one rotatable transfer assembly in an axial direction relative to a plane of rotation of the transfer head.
Bibliography:Application Number: TW20187145616