Light source optimization apparatus and light source optimization method

The disclosure provides a light source optimization apparatus including a storage device and a processor. The storage device stores modules. The processor, coupled to the storage device, is configured to execute the modules. The modules include critical pattern module and light source optimization m...

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Bibliographic Details
Main Authors LIN, TSUNG-WEI, KUO, HUNG-FEI, LI, YU MING, LIAO, CHUN-YEN, HUANG, CHAO-YI, WU, TUNG-YU, WU, CHUN-SHENG
Format Patent
LanguageChinese
English
Published 01.05.2023
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CALCULATING
CINEMATOGRAPHY
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The disclosure provides a light source optimization apparatus including a storage device and a processor. The storage device stores modules. The processor, coupled to the storage device, is configured to execute the modules. The modules include critical pattern module and light source optimization module. The critical pattern module retrieves critical pattern data. The light source optimization module executes an Ant Colony Optimization (ACO) algorithm according to preset parameters to adjust an initial light source image to generate an output light source image, and the initial light source image corresponds to the critical pattern data.
Bibliography:Application Number: TW202211110679