SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

• Main Authors: JANG, SUNG-UP, SMITH, ANTHONY JOHN, KWON, HO-SAN, CHOI, YOUNG-SOO, YU, BANG-YEON, CABLE, SHAWN S, KANG, TAE-UG, YIM, SANG-JAE, KIM, YONG-TAE, LEE, SANG-KEUN, PILTZ, THOMAS WILLIAM, PREGO, JOHN PAUL, HWANG, HYO-JONG, HUGHES, CYNTHIA LEE, KIM, JIHOON
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; STORING OF DISTRIBUTING GASES OR LIQUIDS; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES; WEAPONS

A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconduc...