SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

• Main Authors: JANG, SUNG-UP, SMITH, ANTHONY JOHN, KWON, HO-SAN, CHOI, YOUNG-SOO, YU, BANG-YEON, CABLE, SHAWN S, KANG, TAE-UG, YIM, SANG-JAE, KIM, YONG-TAE, LEE, SANG-KEUN, PILTZ, THOMAS WILLIAM, PREGO, JOHN PAUL, HWANG, HYO-JONG, HUGHES, CYNTHIA LEE, KIM, JIHOON
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; STORING OF DISTRIBUTING GASES OR LIQUIDS; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES; WEAPONS

A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconductor; a main-supply pipe configured to communicate with sub-supply pipes respectively coupled to the plurality of tanks and to supply process material to a semiconductor manufacturing device; a plurality of flow control devices respectively included in the sub-supply pipes and configured to control a process material flow rate discharged from each of the plurality of tanks; a sensor included in the main-supply pipe and configured to measure in real time the process material flow rate and a process material supply pressure supplied from each of the plurality of tanks to the semiconductor manufacturing device; a back-up portion coupled to the main-supply pipe and configured to supplementally discharge stored process m