TWI792396B

Provided is a cassette housing which can carry out temperature adjustment with respect to a semiconductor wafer including a plurality of nonvolatile memory chips.According to one embodiment, a cassette housing includes a storage unit, a probe card, and a container. The storage unit stores a semicond...

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Bibliographic Details
Main Authors HITOMI, TATSURO, SANUKI, TOMOYA, INOUE, ARATA, YOSHIMIZU, YASUHITO, DOHMAE, HIROYUKI, HAYASAKA, KAZUHITO
Format Patent
LanguageChinese
Published 11.02.2023
Subjects
ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
PHYSICS
STORING
TESTING
TRANSPORTING
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Summary:Provided is a cassette housing which can carry out temperature adjustment with respect to a semiconductor wafer including a plurality of nonvolatile memory chips.According to one embodiment, a cassette housing includes a storage unit, a probe card, and a container. The storage unit stores a semiconductor wafer including a plurality of nonvolatile memory chips. The probe card includes a probe to be brought into contact with a pad electrode provided on the semiconductor wafer. The container contains heat transfer fluid for lowering or raising temperature of one or both of the probe card and the semiconductor wafer stored in the storage unit.
Bibliography:Application Number: TW202110125116