Apparatus and method for adjusting the angle of rotation of the magnet system of a tubular magnetron

• Main Authors: HUEBNER, ARMIN, JOHANNSEN, JAN
• Format: Patent
• Language: Chinese; English
• Published: 11.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention concerns a flange unit (11) for rotatably holding a magnet system (36) of a tubular magnetron, such a tubular magnetron and a method for adjusting the angle of the magnet system (36). The flange unit comprises a main scale (1) and a nonius (2), which are designed as discs and each have a rotation angle scale (13). Main scale (1) and nonius (2) are arranged concentrically and adjacent to each other, whereby nonius (2) can be rotated about its common axis (40) relative to main scale (1). The rotation angle scales (13) of main scale (1) and nonius (2) have different scale divisions. Main scale (1) and nonius (2) have connecting means with which the main scale (1) can be mechanically connected to a static component of the tubular magnetron and the nonius (2) to the magnet system (36). The set angle of rotation of the nonius (2) can be locked relative to the main scale (1) by means of a locking device (5).