Substrate holder and substrate transfer robot

A substrate holding hand includes a frame, a plurality of blades each to support a substrate, and a mounting member to support the plurality of blades and mount the plurality of blades to the frame. The plurality of blades are aligned in a direction perpendicular to main surfaces of the blades, and...

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Bibliographic Details
Main Authors SHIMIZU, IPPEI, TAKAUJI, RYUNOSUKE
Format Patent
LanguageChinese
English
Published 21.10.2022
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:A substrate holding hand includes a frame, a plurality of blades each to support a substrate, and a mounting member to support the plurality of blades and mount the plurality of blades to the frame. The plurality of blades are aligned in a direction perpendicular to main surfaces of the blades, and among the plurality of blades, an intermediate blade is removable from the mounting member while an end blade located at an end in the direction perpendicular to the main surfaces of the blades is attached to the mounting member.
Bibliography:Application Number: TW20209138067