TWI773054B

Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same. This charged particle beam device comprises: a sample chamber for accommodating a sample that will serve as an objec...

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Bibliographic Details
Main Authors ETOH, JUN, SHIMIZU, TOSHIHIKO, OGAWA, HIRONORI, NAKAGAWA, SHUICHI, TAKAHASHI, HIROKI, YABATA, KIYOSHI
Format Patent
LanguageChinese
Published 01.08.2022
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MEANS FOR DAMPING VIBRATION
MECHANICAL ENGINEERING
SHOCK-ABSORBERS
SPRINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same. This charged particle beam device comprises: a sample chamber for accommodating a sample that will serve as an object to be observed therein; a column that is disposed on an upper portion of the sample chamber and irradiates and scans the sample with a charged particle beam generated by a charged particle source; and a vibration-suppressing mechanism that is removably provided to the column, said particle beam device being characterized in that the vibration-suppressing mechanism includes a stator affixed to the column, an annular mover that is supported so as to be movable in a direction orthogonal to the axial direction of the column, a plurality of actuators that cause the mover to vibrate in the direction orthogonal to the axial direction of the column, a plurality of vibration sensors affixed to the stator, and a controller
Bibliography:Application Number: TW20209146461