Silicon oxide preparation device

• Main Authors: HSU, SUNG-LIN, LIN, HUANG-WEI, YANG, YU-MIN
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; COMPOUNDS THEREOF; ELECTRICITY; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY

A silicon oxide preparation device includes a heating furnace, a heating device, a crucible, a deposition box, at least one exhaust pipe, and an exhaust device. The crucible and the deposition box are set in the heating furnace, and the heating The device heats the crucible so that the solid raw mat...