DEVICE AND METHOD FOR REMOVING A FRAMED WAFER FROM A WAFER TRAY

• Main Authors: AMMERL, JOSEF, FROESCHL, MICHAEL
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

A device for removing a framed wafer from a wafer tray is described. The wafer tray including a wafer receptacle for receiving the framed wafer. The wafer receptacle being configured to hold the wafer perpendicular to the wafer plane and to remove it from the wafer tray in this manner. The wafer rec...