Method and system for vertical power devices

• Main Authors: RISBUD, DILIP, ODNOBLYUDOV, VLADIMIR, AKTAS, OZGUR
• Format: Patent
• Language: Chinese; English
• Published: 11.02.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of forming a semiconductor device includes providing an engineered substrate. The engineered substrate includes a polycrystalline ceramic core, a barrier layer encapsulating the polycrystalline ceramic core, a bonding layer coupled to the barrier layer, and a substantially single crystallin...