Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber
A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one o...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
11.07.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed. |
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Bibliography: | Application Number: TW20165126663 |