TWI731147B

[Problem] To provide practical technology for achieving the ability to identify a corner position for a rectangular substrate with high precision. [Solution] A camera 4 takes an image of an imaging area 41 after a rectangular substrate S is positioned such that a corner is positioned within the imag...

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Bibliographic Details
Main Authors OOYA, YOSHIYUKI, NAKAJIMA, YU
Format Patent
LanguageChinese
Published 21.06.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CALCULATING
CINEMATOGRAPHY
COMPUTING
COUNTING
ELECTROGRAPHY
HOLOGRAPHY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
MATERIALS THEREFOR
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
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Summary:[Problem] To provide practical technology for achieving the ability to identify a corner position for a rectangular substrate with high precision. [Solution] A camera 4 takes an image of an imaging area 41 after a rectangular substrate S is positioned such that a corner is positioned within the imaging area 41 for the camera 4. When the substrate S is determined to have a corner within the imaging area 41 by a blob Bs detected by binarizing image data, the outermost boundary points P from dark to light in the X direction scan lines Lx are made X direction edge point candidates, and the outermost boundary points P from dark to light in the Y direction scan lines Ly are made Y direction edge point candidates. The intersection of an approximate line passing through the X direction edge point candidates and an approximate line passing through the Y direction edge point candidates is identified as the substrate corner C position.
Bibliography:Application Number: TW20176127721