Method for detecting a leak in a specimen
Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal M during the evacuation of the test ch...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
21.10.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal M during the evacuation of the test chamber, forming a difference D from the progress of the signal M(t) over time t and a fitting function F(t) including the term t−n, where n is a positive rational number, and judging the presence of a leak in the specimen based on the differential signal D. |
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Bibliography: | Application Number: TW20165130062 |