TWI697934B

A microsample stage which fixes microsamples when the microsamples are analyzed by an analyzer includes a base, and middle supports which protrude from an upper surface of the base. A microsample-fixing portion protrudes from an upper surface of each middle support. An alignment mark associated with...

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Bibliographic Details
Main Authors ASAHATA, TATSUYA, MORI, AKITO, YUZURIHA, ASUMI
Format Patent
LanguageChinese
Published 01.07.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A microsample stage which fixes microsamples when the microsamples are analyzed by an analyzer includes a base, and middle supports which protrude from an upper surface of the base. A microsample-fixing portion protrudes from an upper surface of each middle support. An alignment mark associated with each microsample-fixing portion is configured to be recognized by a capturing image to determine a position of attachment of one or more microsamples to each microsample-fixing portion. The microsample stage is made by etching a silicon member, which can be automated to increase work efficiency.
Bibliography:Application Number: TW20165112149