Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible m...

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Bibliographic Details
Main Authors WILDGOOSE, JOE, GAUDREAU, JOHN C, WARNIERS, EVAN, VENET, MARC, LEBLANC, THOMAS
Format Patent
LanguageChinese
English
Published 21.05.2020
Subjects
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Summary:Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.
Bibliography:Application Number: TW20176114378