Small volume, long pathlength multi-pass gas cell for ir and uv monitoring

A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring o...

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Bibliographic Details
Main Authors WRIGHTS, JR. ROBERT L, COATES, JOHN P, BAUM, THOMAS H
Format Patent
LanguageChinese
English
Published 01.02.2020
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Summary:A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor.
Bibliography:Application Number: TW20165101572