Polymer, organic layer composition, and method of forming patterns
The present invention provides a polymer comprising a structure unit represented by chemical formula 1 below and a structure unit represented by chemical formula 2 below, an organic layer composition comprising the polymer, and a method for forming patterns using the organic layer composition. In th...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.08.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention provides a polymer comprising a structure unit represented by chemical formula 1 below and a structure unit represented by chemical formula 2 below, an organic layer composition comprising the polymer, and a method for forming patterns using the organic layer composition. In the chemical formula 1 and 2, A1 and A2 are each independently a divalent group comprising at least one substituted or unsubstituted benzene ring, A3 is a divalent group each containing a quaternary carbon and a ring, symbol * is a point of connection. |
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Bibliography: | Application Number: TW20165136173 |