TWI658532B

• Main Authors: SU, PENG-ZHEN, SHI, BO-BIN, HUANG, GUAN-DI
• Format: Patent
• Language: Chinese
• Published: 01.05.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To provide a substrate cassette with an excellent vibration absorption performance.SOLUTION: The substrate cassette comprises: a cassette frame enclosing a storage space for storing a substrate; and support means that projects into the storage space along a predetermined first direction from the cas...