TWI658532B

To provide a substrate cassette with an excellent vibration absorption performance.SOLUTION: The substrate cassette comprises: a cassette frame enclosing a storage space for storing a substrate; and support means that projects into the storage space along a predetermined first direction from the cas...

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Bibliographic Details
Main Authors SU, PENG-ZHEN, SHI, BO-BIN, HUANG, GUAN-DI
Format Patent
LanguageChinese
Published 01.05.2019
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:To provide a substrate cassette with an excellent vibration absorption performance.SOLUTION: The substrate cassette comprises: a cassette frame enclosing a storage space for storing a substrate; and support means that projects into the storage space along a predetermined first direction from the cassette frame, and can support each substrate stored in the storage space from below. Each support means includes: a support tube that is formed hollow and extends along the first direction from a position in contact with the cassette frame, and that includes two mounting holes which face to an upper direction and are opened upward; an insertion portion inserted into each mounting hole; and an exposure part attached to an upper end of the insertion portion and exposed to the outside of the support tub. Each of the support means further comprises; two pad bolts attached to the two mounting holes, respectively; and a vibration absorber which is made of a vibration absorbent material and is sandwiched between respective
Bibliography:Application Number: TW20170126832