Shower plate, processing apparatus, and ejection method

• Main Authors: MASUNAGA, TAKAYUKI, KATO, SHIGUMA, TERADA, TAKAHIRO, OOTAKI, MAKOTO, HASEGAWA, HITOSHI, TSUNO, SATOSHI, ADACHI, KOSUKE
• Format: Patent
• Language: Chinese; English
• Published: 11.03.2019
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; ATOMISING APPARATUS; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; NOZZLES; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPRAYING APPARATUS; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

According to an embodiment, a shower plate includes a first member and a second member. The first member includes a first wall provided with a plurality of first openings and internally including a room with which the first openings communicate. The second member includes a second wall provided with a second opening and arranged in the room. The second member is arranged at a position spaced apart from the first member, and allows one of the first openings facing the second opening to be replaced with another of the first openings by changing a position of the second member with respect to the first member.