Drawing apparatus and drawing method

• Main Authors: NORIMITSU, YOSHINAO, NAGAO, TATSUYA, NAKAI, KAZUHIRO, KITAMURA, KIYOSHI
• Format: Patent
• Language: Chinese; English
• Published: 21.01.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

A light modulation unit (46) of a drawing device (1) modulates light from a light source (43). A scanning mechanism (2) scans a substrate (9) with the light modulated by the light modulation unit (46). A control unit (6) controls the light modulation unit (46) and the scanning mechanism (2) on the basis of drawing data to execute drawing on the substrate (9). The control unit (6) is provided with a storage unit and a data generation unit. The storage unit stores in advance, for a plurality of ratios of expansion and contraction representing the degrees of expansion and contraction of the substrate (9) from a reference state, run-length data on images when drawing is performed on the substrate (9) that is expanded and contracted at the respective ratios of expansion and contraction, as a plurality of pieces of initial drawing data. The data generation unit generates the drawing data by using selected drawing data that is initial drawing data selected from among the plurality of pieces of initial drawing data o