TWI642868B

• Main Authors: TANAKA, SEIJI, NABEYAMA, YUKI
• Format: Patent
• Language: Chinese
• Published: 01.12.2018
• Subjects: ACTUATING-FLOATS; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COCKS; DEVICES FOR VENTING OR AERATING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

The invention provides a gate valve apparatus which can ensure connection between a valve body and a treatment container, reduce damage to the valve body and the container, and inhibit generation of metal particles. A valve base plate (204) is in the shape of a frame and comprises an opening (204a) of the same size with an opening (1b1) for carrying a base plate. The valve base plate (204) is composed of conductive materials including metal and is between a valve body (202) and the treatment container (1) when the valve body (202) closes the opening (1b1). The same metal material forming the valve base plate (204) forms shield rings (232, 242), so that contact with different metals is reduced and metal particle generation is inhibited.