TWI641466B

Provided are a scribe head capable of actively converting a holder due to a simple structure thereof, and a scribe device. The scribe head (2) comprises: a wheel holder (228) disposed to be able to access to and be separated from a mother substrate (G); a wheel holder (238) disposed to be able to ac...

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Bibliographic Details
Main Authors HASHIMOTO, YASUHIRO, NARUO, TORU
Format Patent
LanguageChinese
Published 21.11.2018
Subjects
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Summary:Provided are a scribe head capable of actively converting a holder due to a simple structure thereof, and a scribe device. The scribe head (2) comprises: a wheel holder (228) disposed to be able to access to and be separated from a mother substrate (G); a wheel holder (238) disposed to be able to access to and be separated from the mother substrate (G); a cylindrical cam (212) rotated by a servomotor (211); a cam follower (221) coming in contact with a cam surface (212a) of the cylindrical cam (212); and a cam follower (231) coming in contact with a cam surface (212b) of the cylindrical cam (212). When the cylindrical cam (212) is rotated clockwise when being seen in a Z axis part side, the cam follower (221) is pressed by the cam surface (212a), so the wheel holder (228) accesses to the mother substrate (G). When the cylindrical cam 9212) is rotated counterclockwise when being seen in a Z axis part side, the cam follower (231) is pressed by the cam surface (212b), so the wheel holder (238) accesses to the mo
Bibliography:Application Number: TW20154103457