Etchant composition for metal layer, method for etching copper-based metal layer using the same, method for preparing array substrate for liquid crystal display device, array substrate for liquid crystal display device prepared therefrom
The present invention provides a metal film etchant composition comprising: (a) phosphoric acid; (b) nitric acid; (c) acetic acid; (d) fluorine compound; (e) sulfuric acid compound; and (f) water, wherein the (e) sulfuric acid compound has a pKa value of -1 to 5.
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
11.08.2018
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Online Access | Get full text |
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Abstract | The present invention provides a metal film etchant composition comprising: (a) phosphoric acid; (b) nitric acid; (c) acetic acid; (d) fluorine compound; (e) sulfuric acid compound; and (f) water, wherein the (e) sulfuric acid compound has a pKa value of -1 to 5. |
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AbstractList | The present invention provides a metal film etchant composition comprising: (a) phosphoric acid; (b) nitric acid; (c) acetic acid; (d) fluorine compound; (e) sulfuric acid compound; and (f) water, wherein the (e) sulfuric acid compound has a pKa value of -1 to 5. |
Author | KWON, MIN JEONG KUK, IN SEOL YOON, YOUNG JIN |
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Snippet | The present invention provides a metal film etchant composition comprising: (a) phosphoric acid; (b) nitric acid; (c) acetic acid; (d) fluorine compound; (e)... |
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SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-LINEAR OPTICS NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF |
Title | Etchant composition for metal layer, method for etching copper-based metal layer using the same, method for preparing array substrate for liquid crystal display device, array substrate for liquid crystal display device prepared therefrom |
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