Optoelectronic inspection quality assurance system for fluid dispensing valves
An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assur...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.05.2018
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Subjects | |
Online Access | Get full text |
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Summary: | An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels. |
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Bibliography: | Application Number: TW20130136793 |