TWI619674B

The present invention provides a refinement method and purification system of the suitable to obtain the nitrogen monoxide gas of the high purity. The nitrogen oxide suppressing the production of the by-product subject is solved. And the refinement method of the nitrogen oxide of the present inventi...

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Bibliographic Details
Main Authors YOKONO, TAKASHI, KAWAKAMI, JUNICHI, TAI, SHINICHI
Format Patent
LanguageChinese
Published 01.04.2018
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Summary:The present invention provides a refinement method and purification system of the suitable to obtain the nitrogen monoxide gas of the high purity. The nitrogen oxide suppressing the production of the by-product subject is solved. And the refinement method of the nitrogen oxide of the present invention includes at least nitrogen oxide, and the adsorption process for conducting the mixing gas containing moisture on the inorganic world absorbent and absorbing moisture in the corresponding absorber. And as the inorganic world absorbent, the preprocessing completion absorber in which the preprocessing for creating the inorganic acid salt is put into effect in advance is used. The invention the system for performing provides the refinement method of such nitrogen oxide.
Bibliography:Application Number: TW20132125341