PLASMA RESISTANT COATING LAYER AND METHOD OF FORMING THE SAME
The present disclosure relates to a plasma resistant coating film and a fabricating method thereof, more particularly a plasma resistant coating film and a fabricating method thereof which can secure chemical resistance by means of, after thermally spraying the first rare earth metal compound, doubl...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
21.02.2018
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Subjects | |
Online Access | Get full text |
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Summary: | The present disclosure relates to a plasma resistant coating film and a fabricating method thereof, more particularly a plasma resistant coating film and a fabricating method thereof which can secure chemical resistance by means of, after thermally spraying the first rare earth metal compound, double sealing through aerosol deposition and hydration, thereby minimizing open channels and open pores in the coating layer and plasma corrosion resistance by means of the dense rare earth metal compound coating film. |
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Bibliography: | Application Number: TW20165144310 |